[China Instrument Network Instrument Research and Development] Recently, the Shanghai Municipal Bureau of Quality Measurement and Technical Supervision project undertaken by the Shanghai Municipal Bureau of Quality and Technical Supervision "sub-micrometer particle / thin film energy spectrum quantitative analysis method" (project number: 2014-02) Accepted by experts.
The spectrometer equipped with a scanning electron microscope is the main means for quickly and accurately obtaining the microdomain composition of materials. With the extensive research of submicron-scale materials, combined with the latest developments in field emission electron microscopy and energy spectrometers, the "submicron-scale particle/thin-film spectroscopy quantitative analysis method study" project team has reduced the electron beam voltage by reducing the scanning electron microscope accelerating voltage. Diffusion range, and the Monte Carlo method to simulate the trajectory of the electron beam at low voltage to determine the appropriate low acceleration voltage. At the same time, a low acceleration voltage EDS standard spectrum library of common elements was established to solve the problem of the lack of a database of low acceleration voltage EDS standard spectral maps, and an absorption correction model for single particles and thin films on the submicron scale was established to optimize quantitative calibration methods at low accelerating voltages. . The project team published 4 articles and established corresponding testing methods according to the research direction of the project, and passed the review of new projects.
The results of this project fill the gaps in the qualitative and quantitative analysis of submicron-scale energy spectra, and provide technical support for the analysis of submicron-scale material microregions. The research results of the project are applied to the study of the solid-state reaction sintering mechanism of ceramics, and the reaction mechanism can be effectively studied to improve the working efficiency. The application of the research results of the project to the determination of the coating thickness under non-destructive conditions can be quickly and accurately determined. Plating thickness reduces test costs.
(Original title: Research on Quantitative Analysis Methods of Particle/Thin Film Spectra Composition at Submicron Scale in Our Institute)
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